• DocumentCode
    1688829
  • Title

    Thermal Plasma Cvd Of Diamond: Relation Between Flow Velocity And Film Growth Chemistry

  • Author

    Girshick, Steven L. ; Yu, B.W.

  • Author_Institution
    University of Minnesota
  • fYear
    1994
  • Firstpage
    164
  • Lastpage
    164
  • Keywords
    Atmospheric modeling; Atomic layer deposition; Atomic measurements; Diamond-like carbon; Ion beams; Laboratories; Plasma chemistry; Plasma transport processes; Predictive models; Spectroscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
  • Conference_Location
    Santa Fe, NM, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-2006-9
  • Type

    conf

  • DOI
    10.1109/PLASMA.1994.588980
  • Filename
    588980
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1688829