DocumentCode
1688842
Title
Deposition Of Diamond-like Carbon Films With Intense Ion Beams
Author
Davis, H.A. ; Rej, D.J. ; Johnston, G.P. ; Muenchausen, R.E. ; Schmidt, H.K. ; Tallant, D.R. ; Thompson, Mark ; Waganaar, W.J. ; Williams, Douglas B.
Author_Institution
Los Alamos National Laboratory
fYear
1994
Firstpage
164
Lastpage
165
Keywords
Diamond-like carbon; Diodes; Ion beams; Laboratories; Particle measurements; Plasma measurements; Plasma temperature; Spectroscopy; Substrates; Velocity measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.588981
Filename
588981
Link To Document