DocumentCode
1688871
Title
Copper Oxide Films Formed By Reactive Cathodic Arc Deposition
Author
Anders, Solveig ; Anders, Andre ; Brown, I.G. ; MacGill, R.A. ; Dickinson, M.R. ; Castro, R.A.
Author_Institution
Lawrence Berkeley Laboratory
fYear
1994
Firstpage
165
Lastpage
165
Keywords
Cathodes; Coatings; Copper; Laboratories; Plasma immersion ion implantation; Plasma materials processing; Plasma properties; Plasma sources; Radio frequency; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.588983
Filename
588983
Link To Document