• DocumentCode
    1688901
  • Title

    Recent Results From A Large-scale Plasma Source Ion Implantation Experiment

  • Author

    Wood, B.P. ; Henins, I. ; Reass, William A. ; Faehl, R.J. ; Rej, D.J. ; Nastasi, M.A. ; Walter, K.C.

  • Author_Institution
    Los Alamos National Laboratory,
  • fYear
    1994
  • Firstpage
    165
  • Lastpage
    166
  • Keywords
    Electron beams; Glass; Ion implantation; Large-scale systems; Plasma accelerators; Plasma immersion ion implantation; Plasma properties; Plasma sources; Pulse modulation; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
  • Conference_Location
    Santa Fe, NM, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-2006-9
  • Type

    conf

  • DOI
    10.1109/PLASMA.1994.588984
  • Filename
    588984
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1688901