Micromoulded spectrometers produced by the LIGA process

MicroParts GmbH have produced a number of miniature spectrometers covering visible, near IR and mid IR wavelengths using microengineering techniques. This paper will explain the LIGA technique for the production of three dimensional microstructures. It will then explain the construction of the first micromoulded spectrometer for visible wavelengths, the subsequent development of a range of such devices for the near infra red and a modified spectrometer for gas detection in the mid infra red wavelength range