Title :
An image processing based measurement in automatic control of semiconductors´ crucible crystallization
Author :
Nski, K. Budzy ; Falkowski, J.L.
Author_Institution :
Inst. of Ind. Automatic Control, Warsaw Univ. of Technol., Poland
Abstract :
Preliminary results of research on vision based feedback for automatic control of crucible monocrystallization of semiconductors are presented. Image processing algorithms for measurement of chosen parameters in the crystallization zone are described. Basic tests of the system installed at its working place are reported
Keywords :
computerised instrumentation; crystallisation; feedback; image processing; process computer control; algorithms; automatic control; computerised instrumentation; crucible monocrystallization; crystallization zone; feedback; image processing; process computer control; research; semiconductors; Automatic control; Crystalline materials; Crystallization; Feeds; Gallium arsenide; Humans; Image processing; Process control; Production; Silicon;
Conference_Titel :
Industrial Electronics, 1992., Proceedings of the IEEE International Symposium on
Conference_Location :
Xian
Print_ISBN :
0-7803-0042-4
DOI :
10.1109/ISIE.1992.279649
