DocumentCode
1690504
Title
Semi-insulating 6H-SIC Epitaxial Films
Author
Mazzola, Michael S. ; Saddow, Stephen E.
Author_Institution
Mississippi State University
fYear
1994
Firstpage
193
Lastpage
193
Keywords
Chemical technology; Chemical vapor deposition; Crystalline materials; Epitaxial growth; Laboratories; Microwave oscillators; Photoconducting materials; Plasma accelerators; Semiconductor materials; Silicon carbide;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.589058
Filename
589058
Link To Document