Title :
Chalcogenide glassy-based photoresists for microelectronics
Author_Institution :
Dept. of Phys., Tech. Univ., Kishinau, Moldova
Abstract :
Possibilities of application in microelectronics of chalcogenide glassy semiconductors (ChGS) as inorganic high-resolution photoresists is treated. A brief consideration of three main effects: photostructural transformations, photo-doping and electrostimulated interaction of ChGS with some metals for lithography is given. The emphasis is put on the third effect which appears to be original and less known as well as on the technical features of lithography processes with ChGS
Keywords :
chalcogenide glasses; integrated circuit technology; photochromism; photoresists; chalcogenide glassy semiconductors; electrostimulated interaction; inorganic high-resolution photoresists; microelectronics; photo-doping; photodarkening; photolithography; photostructural transformations; Chemicals; Etching; Glass; Lithography; Microelectronics; Optical films; Optical sensors; Photochromism; Resists; Transistors;
Conference_Titel :
Microelectronics, 1995. Proceedings., 1995 20th International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-2786-1
DOI :
10.1109/ICMEL.1995.500829
