Title :
Optical absorption of chalcogenide glassy photoresists As-S-Ge
Author :
Marian, S. ; Tsiulyanu, D.I.
Author_Institution :
Dept. of Phys., Tech. Univ., Kishinau, Moldova
Abstract :
The absorption edge of some chalcogenide glassy semiconductors (ChGS) As-S-Ge both in bulk and thin films is studied. The region of the Urbach tail is considered particularly as it determines the efficiency of photostructural transformations of ChGS used in high-resolution lithography
Keywords :
arsenic compounds; chalcogenide glasses; germanium compounds; light absorption; optical glass; photoresists; As-S-Ge; Urbach tail; absorption edge; chalcogenide glassy semiconductors; high-resolution lithography; optical absorption; photoresists; photostructural transformations; thin films; Absorption; Atom optics; Glass; Optical distortion; Optical films; Optical materials; Optical microscopy; Resists; Semiconductor thin films; Tail;
Conference_Titel :
Microelectronics, 1995. Proceedings., 1995 20th International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-2786-1
DOI :
10.1109/ICMEL.1995.500837
