• DocumentCode
    1693134
  • Title

    Recent advances and trends in numerical techniques for process simulation

  • Author

    Joppich, Wolfgang ; Mijalkovic, Slobodan

  • Author_Institution
    German Nat. Res. Center for Inf. Technol., St. Augustin, Germany
  • Volume
    1
  • fYear
    1995
  • Firstpage
    299
  • Abstract
    The gradually increasing complexity of the processing models and necessity to simulate in higher dimensions persistently challenge computational efficiency of the modern process simulators. In this paper, an outlook on the current status and trends in numerical techniques for efficient multidimensional bulk process simulation is given. Grid generation, grid adaptation, discretization and solving techniques are considered as the principle numerical building blocks of modern process simulation tools. The major task and obstacles for each of these numerical segments are recognized and some recently proposed techniques to circumvent current limitations as well as possible directions for future research are discussed
  • Keywords
    digital simulation; mesh generation; numerical analysis; reviews; semiconductor process modelling; discretization; grid adaptation; grid generation; multidimensional bulk process simulation; numerical techniques; process simulation tools; solving techniques; Circuit simulation; Circuit testing; Computational efficiency; Computational modeling; Mesh generation; Microelectronics; Multidimensional systems; Nonhomogeneous media; Semiconductor device testing; Semiconductor devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics, 1995. Proceedings., 1995 20th International Conference on
  • Conference_Location
    Nis
  • Print_ISBN
    0-7803-2786-1
  • Type

    conf

  • DOI
    10.1109/ICMEL.1995.500885
  • Filename
    500885