Title :
Recent advances and trends in numerical techniques for process simulation
Author :
Joppich, Wolfgang ; Mijalkovic, Slobodan
Author_Institution :
German Nat. Res. Center for Inf. Technol., St. Augustin, Germany
Abstract :
The gradually increasing complexity of the processing models and necessity to simulate in higher dimensions persistently challenge computational efficiency of the modern process simulators. In this paper, an outlook on the current status and trends in numerical techniques for efficient multidimensional bulk process simulation is given. Grid generation, grid adaptation, discretization and solving techniques are considered as the principle numerical building blocks of modern process simulation tools. The major task and obstacles for each of these numerical segments are recognized and some recently proposed techniques to circumvent current limitations as well as possible directions for future research are discussed
Keywords :
digital simulation; mesh generation; numerical analysis; reviews; semiconductor process modelling; discretization; grid adaptation; grid generation; multidimensional bulk process simulation; numerical techniques; process simulation tools; solving techniques; Circuit simulation; Circuit testing; Computational efficiency; Computational modeling; Mesh generation; Microelectronics; Multidimensional systems; Nonhomogeneous media; Semiconductor device testing; Semiconductor devices;
Conference_Titel :
Microelectronics, 1995. Proceedings., 1995 20th International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-2786-1
DOI :
10.1109/ICMEL.1995.500885