Generic, Direct-Chip-Attach MEMS packaging design with high density and aspect ratio Through-Wafer Electrical Interconnect

Micro-Electro-Mechanical-Systems (MEMS) are integrated systems combining electrical and mechanical components, which are fabricated using integrated circuit (IC) batch processing techniques. The influence of MEMS is made possible through their benefits in functionality, size, and reliability. In spite of these remarkable and promising achievements in the field of microsystem fabrication, the commercialization of proven devices are lagged far behind expectations, considerably due to high packaging cost, improper packaging design solution and high testing cost. This paper is focused on suggesting and demonstrating a promising generic, modular, Direct-Chip-Attach (DCA), low cost and high reliable MEMS packaging design strategy and solution applying with high aspect ratio Through-Wafer Electrical Interconnect (TWEI). Fabrication of TWEI using dry etching is relatively new technology that can create more and better packaging options than any other conventional packaging design. The various techniques that can make through-wafer vias conductive are demonstrated and analyzed with advantages and drawbacks.