DocumentCode :
1693214
Title :
Polyquinoline coatings and films: improved organic dielectrics for IC´s and MCM´s
Author :
Hendricks, Neil H. ; Hsu, L.C. ; Taran, Carmen ; Marrocco, Matthew L.
Author_Institution :
Maxdem Inc., San Dimas, CA, USA
fYear :
1991
Firstpage :
361
Lastpage :
365
Abstract :
It is pointed out that polymers intended for use in electronics applications must meet a diverse set of stringent requirements on their mechanical, physical, chemical, and electronic properties. New polyquinolines, developed at Maxdem, possess outstanding properties across the board, making them ideal candidates for applications in the electronics industry. These polymers are characterized by excellent thermal and oxidative stability, very low moisture absorption and very low dielectric constant. One member of the family of polyquinolines, PQ-100, is currently under evaluation for use as an interlayer dielectric in high density interconnect applications, including multichip modules. PQ-100 can be cast into free standing films or spin coated to form high-quality coatings on silicon or other surfaces. Films of PQ-100 display a very low thermal expansion coefficient, and extremely low residual stress on silicon substrates. PQ-100 outperforms polyimides in these and other areas critical to high speed, high density packaging
Keywords :
dielectric thin films; integrated circuit technology; packaging; polymer films; IC technology; Maxdem; PQ-100; Si substrate; free standing films; high density interconnect applications; high density packaging; high speed packaging; high-quality coatings; interlayer dielectric; low dielectric constant; low moisture absorption; low residual stress; low thermal expansion coefficient; multichip modules; organic dielectrics; oxidative stability; polymers; polyquinolines; spin coated; thermal stability; Chemicals; Coatings; Dielectric films; Dielectric substrates; Electronics industry; Mechanical factors; Polymers; Semiconductor films; Silicon; Thermal stability;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronics Manufacturing Technology Symposium, 1991., Eleventh IEEE/CHMT International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-0155-2
Type :
conf
DOI :
10.1109/IEMT.1991.279815
Filename :
279815
Link To Document :
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