Title :
Integrated system for consumable yield analysis
Author :
Zhuqing Zong ; Nehring, Ute
Author_Institution :
GLOBALFOUNDRIES, Dresden, Germany
Abstract :
This paper will give an overview on the approach to provide an integrated system for consumable yield analysis at GLOBALFOUNDIRES to support rapid new product ramp, technology development and yield excursion analysis. The business drivers for such a system will be reviewed, and insight will be given into the integration components, software architecture, challenges, and the implemented and proposed solutions. The paper will conclude with a discussion of yield analysis approaches using the system.
Keywords :
integrated circuit yield; semiconductor industry; GLOBALFOUNDIRES; business drivers; consumable yield analysis; integrated system; rapid new product ramp; technology development; yield analysis approaches; yield excursion analysis; Business; Chemicals; Data mining; Data warehouses; Databases; Resists; Slurries; consumable yield analysis; data management;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI
Conference_Location :
Saratoga Springs, NY
DOI :
10.1109/ASMC.2014.6846950
