Title :
Emerging challenges to Carrier Logistics
Author :
Rothe, J. ; Gaxiola, Gabriel ; Marshall, Les ; Asakawa, Tetsuya ; Yamagata, Kenji ; Yamamoto, Manabu
Author_Institution :
Manuf. Technol. Dept., GLOBALFOUNDRIES, Dresden, Germany
Abstract :
This paper provides an overview of current and upcoming requirements for Carrier Logistics and discusses solutions for optimizing the efficiency of capital equipment installed in the fab. An exploration of crucial influencing factors (both on the material handling as well as on the equipment side) will be followed by a discussion of different approaches to the challenges and an assessment of the impact of the proposed improvements.
Keywords :
logistics; materials handling; production equipment; capital equipment; carrier logistics; material handling; Buffer storage; Logistics; Manufacturing; Materials; Production facilities; Throughput; Vehicles; AMHS; carrier exchange time; carrier logistics; equipment throughput; prediction; speculation;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI
Conference_Location :
Saratoga Springs, NY
DOI :
10.1109/ASMC.2014.6846986
