Title :
Hidden equipment productivity opportunities
Author :
Kinauer, Jochen ; Muller, Benjamin
Author_Institution :
AIS Autom. Dresden GmbH, Dresden, Germany
Abstract :
With this paper we will explain opportunities to increase equipment efficiency based on results of a pilot installation to track wafer-to-wafer OEE (Overall Equipment Efficiency) at a 300mm manufacturing site and examples how predictive maintenance procedures can be coordinated with the usage of mobile devices for process & equipment data analysis and as mobile maintenance logbooks.
Keywords :
data analysis; maintenance engineering; manufacturing data processing; mobile handsets; production engineering computing; productivity; semiconductor device manufacture; semiconductor industry; semiconductor technology; equipment data analysis; hidden equipment productivity opportunities; maintenance procedures; manufacturing site; mobile devices; mobile maintenance logbooks; overall equipment efficiency; process data analysis; wafer-to-wafer OEE; Maintenance engineering; Manufacturing; Mobile communication; Mobile handsets; Monitoring; Performance evaluation; Real-time systems;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI
Conference_Location :
Saratoga Springs, NY
DOI :
10.1109/ASMC.2014.6846990
