Title :
Electronic model a thin film gas sensor (TFGS) based on SnO2
Author :
Brynzari, V.I. ; Dmitriev, S.V. ; Korotchenkov, G.S.
Author_Institution :
Lab. of Microelectron., Tech. Univ. of Moldova, Chisinau, Moldova
Abstract :
An electronic model of a CO gas sensor, based on a SnO2 thin film was proposed. This model was based on the analysis of the balance equation of the number of chemisorbed gas particles which are responsible for the surface potential modulation. Experimental results, which confirm the reality of this model were given too
Keywords :
carbon compounds; chemisorption; gas sensors; semiconductor device models; surface potential; thin film devices; tin compounds; CO; SnO2; balance equation; chemisorbed gas particles; electronic model; surface potential; thin film gas sensor; Ceramics; Chemical technology; Conductivity; Electrons; Equations; Filling; Gas detectors; Microelectronics; Thick film sensors; Thin film sensors;
Conference_Titel :
Microelectronics, 1995. Proceedings., 1995 20th International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-2786-1
DOI :
10.1109/ICMEL.1995.500932
