• DocumentCode
    1694251
  • Title

    Manufacturing peculiarities of the SnO2 thin film gas sensors (TFGS)

  • Author

    Dmitriev, S.V. ; Korotchenkov, G.S. ; Brynzari, V.I. ; Necsoiu, T.

  • Author_Institution
    Lab. of Microelectron., Tech. Univ. of Moldova, Chisinau, Moldova
  • Volume
    2
  • fYear
    1995
  • Firstpage
    589
  • Abstract
    This report presents the results of research aimed at the TFGS elaboration. The main purpose of research was to elaborate TFGS technology and topology, which ensures the cost reduction and maximum agreement with possibilities of planar technology used in semiconductor manufacturing
  • Keywords
    gas sensors; semiconductor device manufacture; semiconductor materials; semiconductor thin films; tin compounds; SnO2; TFGS technology; cost reduction; planar technology; semiconductor manufacturing; sensor topology; thin film gas sensors; Building materials; Costs; Dielectric substrates; Gas detectors; Manufacturing; Microelectronics; Semiconductor device manufacture; Temperature sensors; Thin film sensors; Topology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics, 1995. Proceedings., 1995 20th International Conference on
  • Conference_Location
    Nis
  • Print_ISBN
    0-7803-2786-1
  • Type

    conf

  • DOI
    10.1109/ICMEL.1995.500933
  • Filename
    500933
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1694251