Title :
Surface metal contamination on tool components - A case study for evaluating acid extraction ICP-MS measurement process
Author :
Shi Liu ; Bin Liu
Author_Institution :
ChemTrace Anal. Service, Fremont, CA, USA
Abstract :
Measurement system analyses were conducted for acid extraction ICP-MS analysis for trace metal contaminations on the surface of ceramic test coupons. The results revealed that a casually designed Gage R&R study neglecting the nonreplicable nature of the analytical process could lead to erroneous conclusions, e.g. combined Gage R&R consumed 84% of Ca tolerance, which was much inflated by the inherent part-to-part variations. With necessary adjustments to the experimental design and data processing, accurate evaluation could be achieved and the consumption of Ca tolerance was actually 15%. This work proved that careful considerations must be given to the conditions and boundaries of the measurement system analysis in order to avoid pitfalls and to attain accurate results so variation sources and improvement opportunities of the manufacturing processes could be correctly identified.
Keywords :
calcium; mass spectroscopy; semiconductor device manufacture; surface contamination; Ca; Ca tolerance; Gage R&R; ICP-MS measurement process; acid extraction; ceramic test coupons; manufacturing processes; measurement system analyses; surface metal contamination; tool components; trace metal contaminations; Ceramics; Contamination; Measurement uncertainty; Metals; Pollution measurement; Semiconductor device measurement; Surface treatment; Gage R&R; ICP-MS; measurement system analysis; micro contamination; trace metal;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI
Conference_Location :
Saratoga Springs, NY
DOI :
10.1109/ASMC.2014.6847005