DocumentCode
169441
Title
Using in-line film measurement as a proxy for device matching to speed up process change qualification
Author
Chienfan Yu ; Van Roijen, R. ; Shah, Shalin ; Woodard, Eric ; Ayala, Javier ; Sziklas, Edward
Author_Institution
IBM Syst. & Technol. Group, Hopewell Junction, NY, USA
fYear
2014
fDate
19-21 May 2014
Firstpage
245
Lastpage
247
Abstract
We describe two cases where we were able to use in-line macro measurement data to pre-select processes and to do necessary adjustments to prospect matching devices for process qualification. This approach dramatically shortens the time for new process qualification.
Keywords
nanotechnology; semiconductor device manufacture; device matching; in-line film measurement; in-line macro measurement data; process change qualification; Implants; Monitoring; Process control; Qualifications; Semiconductor device measurement; Strips; Time measurement; device matching; in-line measurements; process change qualification; screen oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI
Conference_Location
Saratoga Springs, NY
Type
conf
DOI
10.1109/ASMC.2014.6847007
Filename
6847007
Link To Document