Phased array signal processing for ultrasonic position measurement using resonant microsensors

A simple signal processing method has been proposed for ultrasonic position measurement using resonant microsensors. Micro-fabricated sensors have a high quality factor of mechanical resonance and the high Q-value realizes a high sensitivity, but also causes a long tail of dumping oscillation in a response waveform against a ultrasound pulse. The proposed method reveals pulse arrival points in superposed dumping oscillations by eliminating the long tail. This method has been applied to micro-fabricated resonant sensors with high Q-value and a precise position measurement result is demonstrated.