DocumentCode :
1695528
Title :
Lateral thinking: the challenge of microsystems
Author :
Murari, B.
Author_Institution :
STMicroelectron., Cornaredo, Italy
Volume :
1
fYear :
2003
Firstpage :
1
Abstract :
While conventional microelectronics focuses on incremental improvements of a well-established technology, a new frontier in micro technology has appeared that challenges the way designers work, compelling them to think three dimensionally and also to acquire unusual multi-disciplinary skills. Called Micro-Electro-Mechanical Systems (MEMS), this new field combines silicon fabrication techniques borrowed from the world of microelectronics, but applies them in new ways to merge electrical, mechanical, optical and even fluidics elements into a single device. These new devices will not only lead to interesting new applications, but foster the emergence of a new breed of engineer that has a broader knowledge and perhaps also more room for creative thinking.
Keywords :
elemental semiconductors; microactuators; microfluidics; micromachining; microsensors; silicon; MEMS; Si; conventional microelectronics; electrical elements; fluidics elements; mechanical elements; micro-electro-mechanical systems; microsystems; optical elements; silicon fabrication; Accelerometers; Fluidics; Lithography; Microelectromechanical devices; Microelectromechanical systems; Microelectronics; Micromechanical devices; Optical device fabrication; Optical devices; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
Type :
conf
DOI :
10.1109/SENSOR.2003.1215238
Filename :
1215238
Link To Document :
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