Title :
Electron Collision Data For BCl/sub 3/ Plasmas
Author :
Winstead, Chris ; Pritchard, H.P. ; McKo, V.
Author_Institution :
A. A. Noyes Laboratory of Chemical Physics
Keywords :
Argon; Electrodes; Electrons; Etching; Inductors; Optical imaging; Optical recording; Plasma applications; Plasma materials processing; Plasma properties;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.589122
