Title :
A Toroidal Ecr System For Thin Film Deposition
Author :
Greig, W. ; Zhang, X. ; Baker, M. ; Gangopadhyay, S.
Author_Institution :
Texas Tech University
Keywords :
Inductors; Plasma chemistry; Plasma density; Plasma diagnostics; Plasma materials processing; Plasma measurements; Plasma sources; Plasma stability; Plasma temperature; Sputtering;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.589124
