DocumentCode
1695766
Title
Multi-variable Feedback Regulation Of Plasma Processing Reactors
Author
Firestone, M.A.
Author_Institution
JAYCOR
fYear
1994
Firstpage
216
Lastpage
216
Keywords
Control systems; Feedback; Inductors; Plasma applications; Plasma chemistry; Plasma density; Plasma materials processing; Plasma simulation; Plasma stability; Plasma temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.589125
Filename
589125
Link To Document