Title :
Transport Of Dust Particles In Inductively Coupled Discharges
Author :
Hwang, H.H. ; Ventzek, P.L.G. ; Hoekstra, R. ; Kusbner, M.J.
Author_Institution :
University Of Illinois
Keywords :
Dusty plasma; Electrodes; Electrostatics; Inductors; Plasma applications; Plasma density; Plasma devices; Plasma materials processing; Plasma sources; Plasma temperature;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.589127
