Title :
Dependence of the temperature distribution in micro hotplates on heater geometry and heating mode
Author :
Ruther, P. ; Ehmann, M. ; Lindemann, T. ; Paul, O.
Author_Institution :
Inst. for Microsyst. Technol., Freiburg Univ., Germany
Abstract :
This paper reports experimental and numerical results on the temperature distribution in micro hotplates. The test structures applied in this study consist of suspended membranes with two integrated polysilicon heaters and discrete resistive thermistors for temperature measurement. The influence of different heater geometries and heating modes are evaluated with respect to an improvement of the temperature homogeneity across the suspended membrane. The experiments are compared with simulation results obtained with the finite element (FE) simulation tool SOLIDIS 6.0.
Keywords :
electric heating; finite element analysis; semiconductor device models; temperature distribution; thermistors; Si; finite element simulation; heater; heating mode; integrated polysilicon heaters; micro hotplates; resistive thermistors; suspended membranes; temperature distribution; Biomembranes; Geometrical optics; Geometry; Heating; Silicon; Temperature distribution; Temperature measurement; Temperature sensors; Testing; Thermistors;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215256
