Dependence of the temperature distribution in micro hotplates on heater geometry and heating mode

Author

Ruther, P. ; Ehmann, M. ; Lindemann, T. ; Paul, O.

Author_Institution

Inst. for Microsyst. Technol., Freiburg Univ., Germany

Volume

1

fYear

2003

Firstpage

73

Abstract

This paper reports experimental and numerical results on the temperature distribution in micro hotplates. The test structures applied in this study consist of suspended membranes with two integrated polysilicon heaters and discrete resistive thermistors for temperature measurement. The influence of different heater geometries and heating modes are evaluated with respect to an improvement of the temperature homogeneity across the suspended membrane. The experiments are compared with simulation results obtained with the finite element (FE) simulation tool SOLIDIS 6.0.

Keywords

electric heating; finite element analysis; semiconductor device models; temperature distribution; thermistors; Si; finite element simulation; heater; heating mode; integrated polysilicon heaters; micro hotplates; resistive thermistors; suspended membranes; temperature distribution; Biomembranes; Geometrical optics; Geometry; Heating; Silicon; Temperature distribution; Temperature measurement; Temperature sensors; Testing; Thermistors;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1215256

Filename

1215256