Title :
A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems
Author :
Tingrui Pan ; Wei Zheng ; Ming Lei ; Cavanagh, B. ; Ziaie, B.
Author_Institution :
Dept. of Electr. & Comput. Eng., Minnesota Univ., MN, USA
Abstract :
In this paper, we present a remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. A SU-8 polymer layer deposited on the top of a gold sacrificial layer was used as the valve structural material. A constant DC current obtained via a telemetry link was used to electrochemically dissolve the gold sacrificial layer and activate the valves. 3/spl times/3 and 4/spl times/4 arrays each containing three different size valves (50/spl times/50, 100/spl times/100 and 200/spl times/200 /spl mu/ m/sup 2/) were fabricated and tested. A current density of 35 mA/cm/sup 2/ resulted in the dissolution of a 3000/spl Aring/ gold sacrificial layer in 30 seconds with the final release completed in 1-2 minutes.
Keywords :
biomedical equipment; biomedical materials; drug delivery systems; electrochemistry; gold; microvalves; 1 to 2 min; 30 sec; Au; biomedical microsystems; current density; dissolution; electrochemical release mechanism; gold sacrificial layer; polymer layer deposition; remotely adjustable check-valve array; valve structural material; Biological materials; Biomedical materials; Biomembranes; Fabrication; Gold; Microvalves; Polymers; Telemetry; Thermal conductivity; Valves;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215266
