Title :
Evaluation of carbon nanotubes as gas sensing materials in micro gas sensors
Author :
Moon, S.I. ; Lee, D.J. ; Jang, Y.T. ; Kim, S.W. ; Lee, Y.H. ; Ju, B.K.
Author_Institution :
Microsyst. Res. Center, Korea Inst. of Sci. & Technol., Seoul, South Korea
Abstract :
We fabricated the gas sensor using carbon nanotubes (CNTs) and investigated the detection properties for NH/sub 3/ gas. The sensing material of gas sensor is employed multi-wall carbon nanotubes (MWNTs). The CNT gas sensor structure is realized with technologies of micro-electro mechanical systems (MEMS). The nanotubes gas sensor is operated at room temperature. And the electrical resistance of the carbon nanotubes is measured upon exposure to NH/sub 3/ gases. Also, recovery time of CNT gas sensor is measured according to temperature.
Keywords :
carbon nanotubes; electric resistance; gas sensors; microsensors; nanotube devices; 293 to 298 K; C; MEMS; MWNT; NH/sub 3/; NH/sub 3/ gas; carbon nanotubes; detection properties; electrical resistance; gas sensing materials; microelectro mechanical systems; microgas sensors; multi-wall carbon nanotubes; nanotubes gas sensor; room temperature; Carbon nanotubes; Electric resistance; Electric variables measurement; Electrical resistance measurement; Gas detectors; Mechanical systems; Micromechanical devices; Organic materials; Temperature measurement; Temperature sensors;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215269
