• DocumentCode
    1696722
  • Title

    Photolithography on optical fiber and micro-fabrication of fiber-optic devices controlling evanescent field

  • Author

    Hane, K. ; Song, J.-H. ; Sasaki, M. ; Taguchi, Y. ; Shimoda, H.

  • Author_Institution
    Dept. of Mechatronics & Precision Eng., Tohoku Univ., Sendai, Japan
  • Volume
    1
  • fYear
    2003
  • Firstpage
    198
  • Abstract
    New photolithographic fabrications of micro fiber-optic devices for telecommunication are reported. A variable attenuator and a tunable filter have been designed based on an evanescent field interaction. The devices have been fabricated by applying surface and bulk micromachining to the optical fiber fixed on the Si substrate. Since the optical fiber is side-polished, the light wave interacts through evanescent field with micro Si structures fabricated on the optical fiber. The initial optical properties in light attenuation and wavelength dependent transmittance have been measured. The proposed fabrication technique will enable a new type of fiber optic devices in telecommunication.
  • Keywords
    elemental semiconductors; light absorption; light scattering; light transmission; micromachining; micromechanical devices; optical attenuators; optical fibre communication; optical fibre fabrication; photolithography; refractive index; silicon; Si; Si substrate; fiber-optic devices controlling evanescent field; light attenuation; micro Si structures; micro-fabrication; micromachining; optical fiber; optical properties; photolithography; telecommunication; tunable filter; variable attenuator; wavelength dependent transmittance; Lithography; Optical attenuators; Optical control; Optical device fabrication; Optical fiber devices; Optical fiber filters; Optical fibers; Optical surface waves; Optical variables control; Telecommunication control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
  • Conference_Location
    Boston, MA, USA
  • Print_ISBN
    0-7803-7731-1
  • Type

    conf

  • DOI
    10.1109/SENSOR.2003.1215287
  • Filename
    1215287