DocumentCode
1696722
Title
Photolithography on optical fiber and micro-fabrication of fiber-optic devices controlling evanescent field
Author
Hane, K. ; Song, J.-H. ; Sasaki, M. ; Taguchi, Y. ; Shimoda, H.
Author_Institution
Dept. of Mechatronics & Precision Eng., Tohoku Univ., Sendai, Japan
Volume
1
fYear
2003
Firstpage
198
Abstract
New photolithographic fabrications of micro fiber-optic devices for telecommunication are reported. A variable attenuator and a tunable filter have been designed based on an evanescent field interaction. The devices have been fabricated by applying surface and bulk micromachining to the optical fiber fixed on the Si substrate. Since the optical fiber is side-polished, the light wave interacts through evanescent field with micro Si structures fabricated on the optical fiber. The initial optical properties in light attenuation and wavelength dependent transmittance have been measured. The proposed fabrication technique will enable a new type of fiber optic devices in telecommunication.
Keywords
elemental semiconductors; light absorption; light scattering; light transmission; micromachining; micromechanical devices; optical attenuators; optical fibre communication; optical fibre fabrication; photolithography; refractive index; silicon; Si; Si substrate; fiber-optic devices controlling evanescent field; light attenuation; micro Si structures; micro-fabrication; micromachining; optical fiber; optical properties; photolithography; telecommunication; tunable filter; variable attenuator; wavelength dependent transmittance; Lithography; Optical attenuators; Optical control; Optical device fabrication; Optical fiber devices; Optical fiber filters; Optical fibers; Optical surface waves; Optical variables control; Telecommunication control;
fLanguage
English
Publisher
ieee
Conference_Titel
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location
Boston, MA, USA
Print_ISBN
0-7803-7731-1
Type
conf
DOI
10.1109/SENSOR.2003.1215287
Filename
1215287
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