Title :
An electrostatic 2-dimensional micro-gripper for nano structure
Author :
Mita, M. ; Kawara, H. ; Toshiyoshi, H. ; Ataka, M. ; Fujita, H.
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Japan
Abstract :
We have successfully microfabricated an electrostatically controlled micro gripper for handling nano particles. The gripper has sharp twin tips that can be independently controlled in the XY-plane, and visually confirmed manipulation of a gold particle trapped in between the twin probes.
Keywords :
electrostatic devices; gold; grippers; micromanipulators; nanoparticles; Au; electrostatic 2-dimensional microgripper; gold particle; handling nanoparticles; nanostructure; twin probes; visually confirmed manipulation; Anisotropic magnetoresistance; Electrostatic actuators; Grippers; Plasma applications; Plasma chemistry; Probes; Scanning electron microscopy; Silicon compounds; Suspensions; Two dimensional displays;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215305
