Title :
Pull-in suppression and torque magnification in parallel plate electrostatic actuators with side electrodes
Author :
Kudrle, T.D. ; Shedd, G.M. ; Wang, C.C. ; Hsiao, J.C. ; Bancu, M.G. ; Kirkos, G.A. ; Yazdi, N. ; Waelti, M. ; Sane, H. ; Mastrangelo, C.H.
Author_Institution :
Corning Intellisense, Wilmington, MA, USA
Abstract :
In this paper we introduce a new electrostatic actuator that provides a large increase in neutral position (no rotation) torque and suppression of pull-in compared to a conventional parallel-plate structure. The actuator geometry incorporates raised electrodes on the side of the rotating element that generate torque versus angle behavior much different than convention parallel plate actuators. Using this electrode configuration we have demonstrated 17-degree stable mechanical rotation on large (950 /spl mu/m diameter) mirrors with 100 V single ended drive-a rotation of 60% of the gap. Driving the mirrors with a differential drive scheme we have demonstrated stable 8-degree rotation with as little as /spl plusmn/18 V.
Keywords :
electrodes; electrostatic actuators; micromirrors; torque; -18 to 18 V; 100 V; 950 micron; actuator geometry; conventional parallel-plate structure; electrodes; micromirrors; mirrors driving; neutral position torque; parallel plate electrostatic actuators; pull-in suppression; rotating element; stable mechanical rotation; torque magnification; Dynamic range; Electrodes; Electrostatic actuators; Geometry; Mirrors; Solid modeling; Solid state circuits; Torque; Transducers; Voltage;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215328
