Title :
Micro-jet nozzle array for precise droplet metering and steering having increased droplet deflection
Author :
Anagnostopoulos, C.N. ; Chwalek, J.M. ; Delametter, C.N. ; Hawkins, G.A. ; Jeanmaire, D.L. ; Lebens, J.A. ; Lopez, A. ; Trauernicht, D.P.
Author_Institution :
Res. & Dev. Labs., Eastman Kodak Co., Rochester, NY, USA
Abstract :
We present the architecture and fabrication method of a fluidic device with increased droplet deflection. The device is capable of producing picoliter size droplets precisely and steering them. The precision is a consequence of the reproducibility of the nozzles that are made using VLSI technology and tools. In addition, the droplet size is determined by the precise timing of applied heat pulses. We present both experimental and modeling results.
Keywords :
CMOS integrated circuits; VLSI; drops; elemental semiconductors; jets; metering; microfluidics; nozzles; silicon; Si; VLSI; droplet deflection; droplet metering; droplet size; fluidic device fabrication; heat pulses; microjet nozzle array; nozzles; picoliter size droplets; reproducibility; steering; CMOS process; CMOS technology; Fabrication; Fluid flow; Geometry; Laboratories; Reproducibility of results; Reservoirs; Temperature; Very large scale integration;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215330
