Title :
Integrated microinstrumentation systems: smart peripherals for distributed sensing and control
Author_Institution :
Michigan Univ., Ann Arbor, MI, USA
Abstract :
The diagram of a typical microinstrumentation system is shown. With software-based digital compensation, the individual precision trimming of each front-end analog circuit block is replaced with a single end-to-end characterization of the chain, lowering overall system cost and changing circuit requirements. A monolithic mass flowmeter front-end containing sensors for flow rate, direction, gas type, pressure, and temperature is shown. Also shown is a micromachined 16-channel CMOS probe for the study of biological neural nets and for use in neural prostheses. In addition, a multielement gas analyzer front-end, consisting of two dual element gas detectors and an interface chip that controls the temperatures of ultrathin gas-sensitive metal films from ambient to over 1000 degrees C, is shown.<>
Keywords :
CMOS integrated circuits; computerised instrumentation; electric sensing devices; flowmeters; gas sensors; probes; CMOS probe; biological neural nets; circuit requirements; distributed sensing; dual element gas detectors; end-to-end characterization; flow rate; front-end analog circuit block; gas type; interface chip; microinstrumentation system; monolithic mass flowmeter front-end; multielement gas analyzer front-end; neural prostheses; overall system cost; precision trimming; smart peripherals; software-based digital compensation; ultrathin gas-sensitive metal films; Analog circuits; Biosensors; Costs; Gas detectors; Intelligent sensors; Neural networks; Probes; Prosthetics; Sensor phenomena and characterization; Temperature sensors;
Conference_Titel :
Solid-State Circuits Conference, 1993. Digest of Technical Papers. 40th ISSCC., 1993 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-0987-1
DOI :
10.1109/ISSCC.1993.280056
