DocumentCode
1698
Title
Experimental investigation of electron emission from dielectric surfaces due to primary electron beam: a review
Author
Chvyreva, A. ; Pemen, A.J.M.
Author_Institution
Dept. of Electr. Eng., Eindhoven Univ. of Technol., Eindhoven, Netherlands
Volume
21
Issue
5
fYear
2014
fDate
Oct. 2014
Firstpage
2274
Lastpage
2282
Abstract
When charged particles impact the surface of a solid material, they can be backscattered from that surface or cause secondary electrons to be emitted. The ratio of the number of emitted electrons (secondary and backscattered) to the incident electrons number is known as the total electron emission yield. Knowledge of this total electron emission yield (TEEY) is highly required in various modern technologies, and several experimental techniques were developed with the purpose of its determination. However, experimental data, obtained with different methods are not in good agreement and sometimes are even contradictive. The purpose of this paper is to review the existing experimental methods of investigating electron emission (EE) from dielectric surfaces, as well as to analyze their accuracy and reliability. The focus is on the processes of the emission from thick layers of insulators which is the case for modern high voltage technologies.
Keywords
dielectric materials; electron beams; electron emission; TEEY; backscattered electrons; charged particles; dielectric surfaces; emitted electrons; incident electrons; primary electron beam; secondary electrons; solid material; total electron emission yield; Current measurement; Dielectric measurement; Dielectrics; Electric potential; Electron emission; Surface charging; Surface treatment; Electron emission; dielectric materials; insulators; reviews; yield estimation;
fLanguage
English
Journal_Title
Dielectrics and Electrical Insulation, IEEE Transactions on
Publisher
ieee
ISSN
1070-9878
Type
jour
DOI
10.1109/TDEI.2014.004487
Filename
6927357
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