Title :
Surface micromachined and integrated capacitive sensors for microfluidic applications
Author :
Shih, J. ; Xie, J. ; Yu-Chong Tai
Author_Institution :
Dept. of Electr. Eng., California Inst. of Technol., Pasadena, CA, USA
Abstract :
We have demonstrated an entire series of capacitive sensors using a multi-layer parylene/photoresist surface micromachining technology. The developed sensors are designed for total integration into parylene-based microfluidic systems for real-time system monitoring. Sensors have been demonstrated for the following applications: in-line pressure sensing (range: 0-35 kPa, resolution: 0.03 kPa); liquid front position and/or volumetric measurements (range: 0->50 pL, resolution: <5 pL); and dielectric measurements, which can be used to deduce fluid properties such as liquid composition. The reported sensor technology demonstrates versatility, high sensitivity, small footprints, and easy integration.
Keywords :
capacitive sensors; dielectric measurement; microfluidics; micromachining; pressure sensors; sensitivity; volume measurement; 0 to 35 kPa; 0.03 kPa; dielectric measurements; footprints; integrated capacitive sensors; line pressure sensing; liquid composition; microfluidic applications; multi-layer parylene-photoresist surface micromachining; real time system monitoring; sensitivity; versatility; volumetric measurements; Capacitive sensors; Dielectric measurements; Microfluidics; Micromachining; Monitoring; Position measurement; Real time systems; Resists; Sensor systems; Volume measurement;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215335
