Characterization of out-of-plane high frequency microresonators by AFM

The feasibility of in-situ characterization of vertically driven high frequency microresonators using atomic force microscopy (AFM) has been successfully demonstrated. The distinctive achievement of this technique is the rapid, direct characterization of resonant frequency and quality factor for structures that cannot be readily characterized using optical or electrical techniques. Experimentally, an annular microresonator was measured to have its fundamental resonance mode at 2.75 MHz with a quality factor of 6. This new characterization approach offers quick and accessible detection means for high frequency microresonators such as microresonator-based wireless communication systems.