DocumentCode :
1698386
Title :
The progress of the ALIVH substrate
Author :
Andoh, Daizo ; Tomita, Yoshihiro ; Nakamura, Tadashi ; Echigo, Fumio
Author_Institution :
Device Dev. Center, Matsushita Electr. Ind. Co. Ltd., Kadoma City, Japan
fYear :
2002
fDate :
6/24/1905 12:00:00 AM
Firstpage :
1419
Lastpage :
1424
Abstract :
The next generation ALIVH substrates were developed named ALIVH G-type for the motherboard use and ALIVH-FB for semiconductor package use. The ALIVH G-type has lower moisture absorption and higher rigidity than the conventional ALIVH. The insulator material of conventional ALIVH is a non-woven aramid-epoxy prepreg. On the other hand, the ALIVH G-type uses glass-epoxy prepreg. We developed the resin flow control technology during the hot press lamination process for hindering the conductive particle in the via paste diffusion. We expect to realize the halogen free ALIVH and liberate the ALIVH from the moisture control, using the glass-epoxy prepreg. The ALIVH-FB has the same structure as the ALIVH. The design rule is minimised for the semiconductor package. The design rule of ALIVH-FB is Line/Space=25/25 μm and Via Diameter/Land Diameter=50/150 μm. The ALIVH-FB uses three new technologies of: (1) film insulator; (2) YAG THG laser drilling process; and (3) accurate alignment process. The ALIVH-FB is very suitable for semiconductor package use by the fine via on via structure and the properties of the film insulator.
Keywords :
insulating thin films; interconnections; laser beam machining; printed circuit manufacture; printed circuits; semiconductor device packaging; substrates; 150 micron; 25 micron; 50 micron; ALIVH G-type; ALIVH substrate family; ALIVH-FB; YAG laser drilling process; alignment process; film insulator; glass-epoxy prepreg; halogen free ALIVH; hot press lamination process; moisture absorption; motherboard use; resin flow control technology; rigidity; semiconductor package use; via on via structure; Absorption; Conducting materials; Insulation; Lamination; Moisture; Resins; Semiconductor device packaging; Semiconductor films; Semiconductor materials; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Components and Technology Conference, 2002. Proceedings. 52nd
ISSN :
0569-5503
Print_ISBN :
0-7803-7430-4
Type :
conf
DOI :
10.1109/ECTC.2002.1008292
Filename :
1008292
Link To Document :
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