DocumentCode
1698386
Title
The progress of the ALIVH substrate
Author
Andoh, Daizo ; Tomita, Yoshihiro ; Nakamura, Tadashi ; Echigo, Fumio
Author_Institution
Device Dev. Center, Matsushita Electr. Ind. Co. Ltd., Kadoma City, Japan
fYear
2002
fDate
6/24/1905 12:00:00 AM
Firstpage
1419
Lastpage
1424
Abstract
The next generation ALIVH substrates were developed named ALIVH G-type for the motherboard use and ALIVH-FB for semiconductor package use. The ALIVH G-type has lower moisture absorption and higher rigidity than the conventional ALIVH. The insulator material of conventional ALIVH is a non-woven aramid-epoxy prepreg. On the other hand, the ALIVH G-type uses glass-epoxy prepreg. We developed the resin flow control technology during the hot press lamination process for hindering the conductive particle in the via paste diffusion. We expect to realize the halogen free ALIVH and liberate the ALIVH from the moisture control, using the glass-epoxy prepreg. The ALIVH-FB has the same structure as the ALIVH. The design rule is minimised for the semiconductor package. The design rule of ALIVH-FB is Line/Space=25/25 μm and Via Diameter/Land Diameter=50/150 μm. The ALIVH-FB uses three new technologies of: (1) film insulator; (2) YAG THG laser drilling process; and (3) accurate alignment process. The ALIVH-FB is very suitable for semiconductor package use by the fine via on via structure and the properties of the film insulator.
Keywords
insulating thin films; interconnections; laser beam machining; printed circuit manufacture; printed circuits; semiconductor device packaging; substrates; 150 micron; 25 micron; 50 micron; ALIVH G-type; ALIVH substrate family; ALIVH-FB; YAG laser drilling process; alignment process; film insulator; glass-epoxy prepreg; halogen free ALIVH; hot press lamination process; moisture absorption; motherboard use; resin flow control technology; rigidity; semiconductor package use; via on via structure; Absorption; Conducting materials; Insulation; Lamination; Moisture; Resins; Semiconductor device packaging; Semiconductor films; Semiconductor materials; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference, 2002. Proceedings. 52nd
ISSN
0569-5503
Print_ISBN
0-7803-7430-4
Type
conf
DOI
10.1109/ECTC.2002.1008292
Filename
1008292
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