• DocumentCode
    1698855
  • Title

    Limiting current type oxygen sensor with graded-composition layer electrode

  • Author

    Suzuki, T. ; Iio, M. ; Okuno, T. ; Ogino, K. ; Ishiguro, Y. ; Kondo, M. ; Takahashi, H. ; Inaba, T. ; Kondo, H. ; Saji, K.

  • Author_Institution
    Gas Equipment Dev. Div., Yazaki Meter Co. Ltd., Shizuoka, Japan
  • Volume
    1
  • fYear
    2003
  • Firstpage
    516
  • Abstract
    Limiting current type oxygen sensors using a thin-film zirconia electrolyte and platinum electrodes have been reported previously. However, for this configuration, in which the electrolyte resistance is minimized, the sensor performance may be dominated by the electrode interface resistance. Accordingly, an improved sensor with graded-composition layer electrodes (GLE) has been developed to reduce the electrode interface resistance in such a device. Sensors fabricated with GLE displayed good linearity and high stability to oxygen concentrations from 0% to 100%, due to a decrease in the electrode interface resistance.
  • Keywords
    gas sensors; oxygen; platinum; sputtered coatings; thin films; O/sub 2/; Pt-ZrO/sub 2/-Y/sub 2/O/sub 3/; electrode interface resistance; graded-composition layer electrode; graded-composition layer electrodes; oxygen concentrations; oxygen sensor; platinum electrodes; sensors fabrication; thin-film zirconia electrolyte; Anodes; Cathodes; Electrodes; Gas detectors; Immune system; Oxygen; Platinum; Sensor phenomena and characterization; Sputtering; Thin film sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
  • Conference_Location
    Boston, MA, USA
  • Print_ISBN
    0-7803-7731-1
  • Type

    conf

  • DOI
    10.1109/SENSOR.2003.1215367
  • Filename
    1215367