DocumentCode
1698855
Title
Limiting current type oxygen sensor with graded-composition layer electrode
Author
Suzuki, T. ; Iio, M. ; Okuno, T. ; Ogino, K. ; Ishiguro, Y. ; Kondo, M. ; Takahashi, H. ; Inaba, T. ; Kondo, H. ; Saji, K.
Author_Institution
Gas Equipment Dev. Div., Yazaki Meter Co. Ltd., Shizuoka, Japan
Volume
1
fYear
2003
Firstpage
516
Abstract
Limiting current type oxygen sensors using a thin-film zirconia electrolyte and platinum electrodes have been reported previously. However, for this configuration, in which the electrolyte resistance is minimized, the sensor performance may be dominated by the electrode interface resistance. Accordingly, an improved sensor with graded-composition layer electrodes (GLE) has been developed to reduce the electrode interface resistance in such a device. Sensors fabricated with GLE displayed good linearity and high stability to oxygen concentrations from 0% to 100%, due to a decrease in the electrode interface resistance.
Keywords
gas sensors; oxygen; platinum; sputtered coatings; thin films; O/sub 2/; Pt-ZrO/sub 2/-Y/sub 2/O/sub 3/; electrode interface resistance; graded-composition layer electrode; graded-composition layer electrodes; oxygen concentrations; oxygen sensor; platinum electrodes; sensors fabrication; thin-film zirconia electrolyte; Anodes; Cathodes; Electrodes; Gas detectors; Immune system; Oxygen; Platinum; Sensor phenomena and characterization; Sputtering; Thin film sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location
Boston, MA, USA
Print_ISBN
0-7803-7731-1
Type
conf
DOI
10.1109/SENSOR.2003.1215367
Filename
1215367
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