Thin film micro carbon oxide sensor using MEMS process

Author

Yeung-Il Bang ; Kap-Duk Song ; Jeung-Soo Huh ; Soon-Don oi ; Duk-Dong Lee

Author_Institution

Sch. of Electron. & Electr. Eng., Kyungpook Nat. iv., Daegu, South Korea

Volume

1

fYear

2003

Firstpage

532

Abstract

Pt/Na/sup +/ ion conductive ceramics thin film/Pt/carbonate a/sub 2/CO/sub 3/:BaCO/sub 3/=1:1.7 mol) structure micro CO/sub 2/ sensors were prepared and their sensing properties were investigated. The thin film Na/sup +/ ion conductors formed by using RF magnetron sputtering technique. The chemical composition of thin film Nae6>/e6> ion conductor was found to be same as that of NASICON(x=2). The nernst slope of 57 mV/decade or CO/sub 2/ concentration range between 1,000 to 10,000 ppm was observed at the operating temperature of 400/spl deg/C.

Keywords

carbon compounds; ceramics; gas sensors; ionic conductivity; metallic thin films; microsensors; platinum; sodium; sputtered coatings; 400 degC; CO/sub 2/; CO/sub 2/ concentration; MEMS; Pt-Na; Pt/Na/sup +/ ion conductive ceramics; RF magnetron sputtering technique; chemical composition; sensing properties; structure micro CO/sub 2/ sensors; thin film Na ion conductors; thin film micro carbon oxide sensor; thin film/Pt/carbonate; Ceramics; Chemical sensors; Conductive films; Gas detectors; Magnetic sensors; Micromechanical devices; Radio frequency; Sputtering; Temperature distribution; Thin film sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1215371

Filename

1215371