Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system

Author

Wang, K. ; Bohringer, K.F. ; Sinclair, M. ; Starkweather, G.

Author_Institution

Washington Univ., Seattle, WA, USA

Volume

1

fYear

2003

Firstpage

572

Abstract

This paper presents likely the world´s smallest electrostatic visible light highly space-efficient transmissive micro-optical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150 /spl mu/m/spl times/150 /spl mu/m spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47 /spl mu/m/spl times/160 /spl mu/m size can achieve a maximum static lateral displacement of 10 /spl mu/m at 38 V. Depending on the zigzag actuator design, these devices have a mechanical resonance frequency of up to 18.6 kHz.

Keywords

electrostatic actuators; micro-optics; microdisplays; optical switches; 18.6 kHz; 38 V; integrated MEMS optical display system; mechanical resonance frequency; space efficient electrostatic zigzag transmissive microoptic switches; zigzag actuator design; Displays; Focusing; High speed optical techniques; Integrated optics; Lenses; Micromechanical devices; Microoptics; Optical arrays; Optical design; Optical switches;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1215381

Filename

1215381