Electrostatic actuated interference filters as optical switches for projection display applications

Author

Panitz, M. ; Benecke, W.

Author_Institution

Inst. fur Mikrosensoren, Aktuatoren und Syst., Univ. of Bremen, Bremen, Germany

Volume

1

fYear

2003

Firstpage

580

Abstract

Optical elements for modulating light based on switchable interference filters are described. Such types of elements could be designed for use in reflection and, unlike micro mirrors, in transmission as well, which often simplifies the design of optical systems. Switching elements based on LPCVD silicon nitride membranes were developed for use in reflection. The switches show optimum performance around the wavelength they are designed for. Efficiencies (fractions of the incident light that is passing the switch) of bout 70% were measured for the design wavelength. First samples for use in trans-mission have been manufactured on quartz substrates.

Keywords

electrostatic actuators; interference filters; light reflection; light transmission; membranes; microdisplays; optical modulation; optical switches; silicon compounds; LPCVD silicon nitride membranes; SiN; SiO/sub 2/; display applications; electrostatic actuated interference filters; micromirrors; optical elements; optical modulation; optical switches; optical systems; quartz substrates; reflection; switchable interference filters; transmission; Biomembranes; Displays; Electrostatic interference; Mirrors; Optical design; Optical filters; Optical modulation; Optical reflection; Optical switches; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1215383

Filename

1215383