Title :
A miniature confocal optical microscope with MEMS gimbal scanner
Author :
Murakami, K. ; Murata, A. ; Suga, T. ; Kitagawa, H. ; Kamiya, Y. ; Kubo, M. ; Matsumoto, K. ; Miyajima, H. ; Katashiro, M.
Author_Institution :
Olympus Opt. Co. Ltd., Tokyo, Japan
Abstract :
We have developed a unique miniature confocal microscope with a MEMS scanner and successfully obtained a real time image. A scanning head including the MEMS scanner, an optical fiber and an aspherical objective lens is precisely and compactly assembled. By employing two reflectors optical design with the lens, an observation of a longitudinal direction was achieved. The mirrors in the scanner Its diameter and length are 3.3 mm and 8 mm, respectively. The lateral resolution of 0.5 /spl mu/m, the depth resolution of 2.9 /spl mu/m, and the field of view of 100/spl times/75 /spl mu/m were achieved.
Keywords :
light reflection; micromechanical devices; micromirrors; optical fibres; optical microscopy; optical scanners; 3.3 mm; 8 mm; MEMS gimbal scanner; aspherical objective lens; confocal optical microscopy; optical fiber; real time image; reflectors optical design; scanning head; Endoscopes; Head; Inspection; Lenses; Micromechanical devices; Optical microscopy; Optical sensors; Packaging; Solid state circuits; Transducers;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215385
