A novel micro optical system employing inclined polymer mirrors and Fresnel lens for monolithic integration of optical disk pickup heads

This paper proposes a novel method to integrate precisely fabricated inclined-mirrors and on-chip Fresnel lens for optical pickup-head application. A new technology of glycerol-compensated incline-exposure has been adopted for the fabrication of 45/spl deg/ mirror pairs. Device fabrication has been successfully completed and testing result demonstrated functional VCSEL beam focusing onto a 5 /spl mu/m spot. This new integration approach provides an easy and low cost fabrication mean without the need of assembly. The fabricated optical components are robust, accurate aligned, and ready for free space operation as in an optical pickup-head.