Title :
Ultrasonic particle manipulation in microchannels using phased co-planar transducers
Author :
Dougherty, G.M. ; Pisano, A.P.
Author_Institution :
Dept. of Mater. Sci. & Eng., California Univ., Berkeley, CA, USA
Abstract :
We report the demonstration of a new, simple and flexible method of performing ultrasonic particle manipulations within planar microfluidic systems, using a set of ultrasonic transducers co-located on the top (or bottom) of a microchannel and driven with out-of-phase electrical signals. This method allows for the generation of in-plane standing waves while overcoming the integration challenges that have previously hindered the use of ultrasonic methods within microfluidic lab-on-a-chip or micro total analysis systems (/spl mu/TAS). We present the design of a simple device consisting of a pair of co-planar lead zirconate titanate (PZT) transducers mounted atop an anisotropically etched microchannel, including structural and acoustic finite element analysis (FEA) predictions of the device performance. Test results on suspensions of polystyrene beads show that the performance is in accordance with the analyses and with acoustic radiation force theory. We describe ongoing work on the development of a variety of more advanced and highly integrated devices, based on this method, that are suitable for performing a wide range of ultrasonic particle manipulations within microfluidic systems.
Keywords :
acoustic analysis; finite element analysis; integrated circuit design; integrated circuit modelling; lead compounds; microfluidics; micromanipulators; piezoelectric materials; piezoelectric transducers; polymers; suspensions; ultrasonic transducers; zirconium compounds; FEA; PZT; PbZrO3TiO3; acoustic finite element analysis; acoustic radiation force theory; anisotropically etched microchannel; coplanar lead zirconate titanate transducers; electrical signals; highly integrated devices; microchannels; microfluidic lab-on-a-chip; phased coplanar transducers; planar microfluidic systems; polystyrene beads; suspensions; ultrasonic particle manipulation; Acoustic devices; Acoustic transducers; Anisotropic magnetoresistance; Lab-on-a-chip; Lead; Microchannel; Microfluidics; Performance analysis; Titanium compounds; Ultrasonic transducers;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215562