• DocumentCode
    1700048
  • Title

    Integrated polymer waveguides for absorbance detection in chemical analysis systems

  • Author

    Mogensen, K.B. ; El-Ali, J. ; Wolff, A. ; Kutter, J.P.

  • Author_Institution
    Microelek. Centre, Tech. Univ. of Denmark, Lyngby, Denmark
  • Volume
    1
  • fYear
    2003
  • Firstpage
    694
  • Abstract
    A chemical analysis system for absorbance detection with integrated polymer waveguides is reported for the first time. The fabrication procedure relies on structuring of a single layer of the photoresist SU-8, so both the microfluidic channel network and the optical components, which include planar waveguides and fiber-to-waveguide coupler structures, are defined in the same processing step. This results in self-alignment of all components and enables a fabrication and packaging time of only one day. The fabrication scheme has recently been presented elsewhere for fluorescence excitation of beads. The emphasis of this paper is on the signal-to-noise ratio of the detection and its relation to the sensitivity. Two absorbance cells with an optical path length of 100 /spl mu/m and 1000 /spl mu/m were characterized and compared in terms of sensitivity, limit of detection and effective path length for measurements of the dye Bromothymol Blue. The influence of three different bonding procedures on the spectrally resolved propagation loss of the integrated waveguides between 500 nm and 900 nm was furthermore determined.
  • Keywords
    dyes; fluorescence; integrated circuit packaging; microfluidics; optical fibre couplers; optical fibre losses; optical planar waveguides; photoresists; polymers; sensitivity; 100 micron; 1000 micron; 500 to 900 nm; absorbance cells; absorbance detection; bonding; chemical analysis systems; dye bromothymol blue; fiber-waveguide coupler structures; fluorescence excitation; integrated polymer waveguides; microfluidic channel network; optical components; optical path length; packaging time; photoresist SU-8; planar waveguides; sensitivity; signal-to-noise ratio; spectrally resolved propagation loss; Chemical analysis; Microfluidics; Optical device fabrication; Optical devices; Optical planar waveguides; Optical waveguide components; Optical waveguides; Planar waveguides; Polymers; Resists;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
  • Conference_Location
    Boston, MA, USA
  • Print_ISBN
    0-7803-7731-1
  • Type

    conf

  • DOI
    10.1109/SENSOR.2003.1215568
  • Filename
    1215568