Title :
A novel micro Fabry-Perot sensor utilizing refractive index matched medium for high sensitive shear stress sensing
Author :
Lin, Chrong-Jung ; Tseng, F.-G.
Author_Institution :
Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan
Abstract :
This paper proposes a novel shear stress sensor based on the principle of Fabry-Perot interferometer and fabricated by polymer-MEMS technology. The surface roughness of the floating element, fabricated by W lithography on SU-8 resist, is better than 7nm on 15*15 pn2 area and suitable for reflection mirrors. Silicon oil is filled into the sensor cavity as a refractive-index matching medium for signal enhancement as well as a buffer material for pressure resistance and vibration reduction.
Keywords :
DNA; biomedical materials; biosensors; cellular biophysics; chemical sensors; electrostatic actuators; genetic engineering; genetics; gyroscopes; infrared detectors; magnetic sensors; microfluidics; micromirrors; micropumps; microrobots; microvalves; molecular biophysics; nanotechnology; pressure sensors; DNA processing; RF MEMS; accelerometers; actuators; biochips; biomedical prosthesis; cell sensing; chemical sensors; device design; droplet dispensing; electrostatic actuators; fluid sensing systems; fluidic manipulation systems; force mass sensors; gas sensing systems; genomics; gyros; in-vivo biosensors; infrared sensors; integrated biosystems; integrated chemical microprocessing; integrated fabrication technologies; magnetic sensors; micro grippers; micro resonator damping; micromanipulation; micropower generator; micropumps; microrobotic actuators; microsystems; microvalves; nano fluidic manipulation; nanostructure fabrication; on-chip power; optical microsystems; packaging; polymer microfabrication technologies; pressure sensors; sensors biotechnology; silicon materials fabrication; simulation fabrication; solid-state sensors; Acoustic sensors; Chemical sensors; Fabry-Perot; Optical fiber sensors; Optical films; Optical sensors; Refractive index; Fiber-optic Fabry-Perot sensor; nano displacement sensing; polymer MEMS; shear stress sensing;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215572
