Local growth of sol-gel films by means of microhotplates

Author

Calame, F. ; Baborowski, J. ; Ledermann, N. ; Muralt, P.

Author_Institution

Ceramics Lab., Swiss Fed. Inst. of Technol., Lausanne, Switzerland

Volume

1

fYear

2003

Firstpage

750

Abstract

PZT (PbZr/sub x/Ti/sub 1-x/O/sub 3/) thin films have been locally grown by means of sol-gel deposition and local anneals on microhotplate. The microhotplate was based on a tantalum silicide filament (Ta/sub 5/Si/sub 3/) formed on stress compensated SiN/SiO/sub 2/ membrane. On this filament, a passivation layer of SiO/sub 2/, a layer of Ti/TiO/sub 2/ and a bottom electrode of Pt were deposited. Due to the low heat conductivity of the membrane, crystallization of the PZT film occurs exactly on the resistor filament. The formation of crystalline, i.e. perovskite PZT was verified by means of X-ray diffraction. A random PZT texture has been observed.

Keywords

X-ray diffraction; annealing; crystallisation; electrochemical electrodes; heat conduction; internal stresses; lead compounds; membranes; passivation; piezoelectric materials; piezoelectric thin films; platinum; sol-gel processing; tantalum compounds; texture; PZT; PZT thin films; PbZrO3TiO3; Pt; Pt electrode; Ta/sub 5/Si/sub 3/; X-ray diffraction; annealing; crystallization; heat conductivity; microhotplates; passivation; resistor filament; sol-gel films; stress compensated SiN/SiO/sub 2/ membrane; tantalum silicide filament; texture; Annealing; Biomembranes; Conductivity; Crystallization; Electrodes; Passivation; Silicides; Silicon compounds; Sputtering; Stress;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1215582

Filename

1215582