Title :
Rapid, low-cost fabrication of parylene microchannels for microfluidic applications
Author :
Hong-seok Noh ; Yoonsu Choi ; Chi-fu Wu ; Hesketh, P.J. ; Allen, M.G.
Author_Institution :
Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
This paper presents a rapid and low-cost fabrication method of parylene microchannels, so-called ´parylene micromolding´. Technical aspects of this new method are explored and some example products fabricated by this method are displayed. Among them, meander type channel, long spiral channel, electrophoretic channel, and dielectrophoretic channel are included.
Keywords :
microfluidics; micromachining; moulding; polymers; dielectrophoretic channel; electrophoretic channel; long spiral channel; meander type channel; microfluidic applications; parylene microchannel fabrication; parylene micromolding; Application software; Bonding; Costs; Etching; Fabrication; Microchannel; Microfluidics; Micromachining; Resists; Silicon;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215594
