Self-assembled real monolayer coating to improve release of MEMS structures

This abstract reports a new anti-stiction coating that improves the releasing of surface-micromachined products. The difference with respect to similar work in this field is the type of molecules used for the coating that impinges the formation of aggregates or chains. These aggregates can be responsible for the structure malfunctioning and can even bind the released structures to the substrate. The suppression of these aggregates or chains with our coating has been confirmed by roughness measurements on such coatings. Moreover, we have measured an advancing contact angle of 127/spl deg/, which is the best contact angle obtained on similar coating to our knowledge. And finally, this coating has been successfully used to improve the release related stiction on MEMS test structures and products.