Title :
Autonomous micro-sensor arrays for process control of semiconductor manufacturing processes
Author :
Fisher, Darin ; Freed, Mason ; Spanos, Costas ; Poolla, Kameshwar
Author_Institution :
Dept. of Mech. Eng., California Univ., Berkeley, CA, USA
fDate :
6/21/1905 12:00:00 AM
Abstract :
We first motivate the use of autonomous micro-sensor arrays for use in semiconductor manufacturing. Following this, we discuss three critical issues that must be addressed in order to realize our goal of building these micro-sensor arrays. We then describe our on-going development-efforts of fabricating spatially resolved etch-rate and temperature sensors
Keywords :
CMOS integrated circuits; arrays; etching; integrated circuit manufacture; microsensors; process control; process monitoring; temperature sensors; autonomous micro-sensor arrays; baseline CMOS processing; semiconductor manufacturing processes; spatially resolved etch-rate sensors; temperature sensors; Etching; Manufacturing processes; Mechanical engineering; Metrology; Monitoring; Process control; Sensor arrays; Spatial resolution; Throughput; Wireless sensor networks;
Conference_Titel :
Decision and Control, 1999. Proceedings of the 38th IEEE Conference on
Conference_Location :
Phoenix, AZ
Print_ISBN :
0-7803-5250-5
DOI :
10.1109/CDC.1999.828017
